150 mm³ Scanning
Coordinate Measuring Machine
 The OPI 150 is an ultra-precision Scanning Coordinate Measuring Machine that can be equipped with either three or four computer-controlled axes. The three-axis configuration has three linear, air-bearing axes (X, Y, and Z). Each linear axis has a positioning resolution of 0.06 nanometers and a positioning uncertainty of ±0.05 microns (50 nanometers) within the entire 150 x 150 x 150 mm work volume. The four-axis version adds an ultra-precise, air bearing, rotary C-axis with a resolution of 0.18 arc-seconds, and a positioning uncertainty of 0.25 arc-seconds. The vertical work capacity (throat height) can be adjusted to allow variations in fixtures and accessories.
Design Features
The X- and Y-axes of the machine are located on a monolithic granite machine base, which, in turn, rests upon a pneumatic active leveling and vibration isolation system. The Z-axis is located on the face of a stationary, bridge-mounted column. The C-axis, if specified, is located on the X-Y axis stack. The entire machine is kinematically supported on a fabricated steel frame.
The Z-axis of the machine carries the gaugehead and probe; the Z-axis is supported by air bearing counterpoise cylinders, which are servoed to the Z-axis linear motor current. The X-Y axis slide stack supports the workpiece. Linear dc servomotors drive all of the linear slides—which, with the use of lightweight materials, are of approximately equal bandwidth.
The optional C-axis uses a direct-drive, slotless, brushless dc servomotor with minimal cogging. It has a directly-coupled, high-accuracy rotary encoder with a resolution of 0.18 arc-seconds. Positioning uncertainties approaching encoder resolution are available at additional cost.
Gaugehead
 The standard gaugehead is a three-axis, analog device that can support scanning of the workpiece, or can be operated as a conventional touch probe. The resolution (and scanning noise limit) of the gaugehead is four nanometers. The gauge head uses monolithic flexure technology to achieve extremely low (down to 0.1 mN) contact force. This allows the inspection of compliant (soft metal, soft ceramic, glass) parts without scratching or otherwise damaging their surfaces. Other gauging systems (e.g., capacitance probes, air-bearing LVDTs) are available.
To realize the performance promised by the dimensional capabilities of this machine, OPI 150 is offered with an optional temperature-controlled air shower enclosure that will maintain the machine and its work piece at a constant temperature—nominally 20°C, controlled to within .005° C. The air shower can be configured such that the machine operator need not work in the showered area, but in a more comfortable shop environment.
Specifications
| Measuring Range |
| X: 150 mm |
Y: 150 mm |
Z: 150 mm |
C: Continuous |
|
| Measurement Standard |
Ultra-high precision linear encoders |
| Linear Resolution (X, Y, Z) |
0.06 nanometers |
| C-Axis Resolution |
0.18 arc-seconds |
|
(0.17+L/1000) µm |
|
0.2 µm |
| Guide Bearings |
Air hydrostatic |
| Max Drive Speed |
100 mm/s |
| Max Acceleration |
400 mm/s²
|
| Work Table: |
150 mm², stainless steel |
| Max Work Mass |
30 Kg |
| Machine Mass |
1415 Kg |
| Height, Width, Depth |
1890 mm x 1275 mm x 1110 mm not including CRT |
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